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Effects of argon dilution of an ethanol hydrogen gas feed on the growth of diamond by hot-filament chemical vapor deposition

zsbird1223 添加于 2010-6-10 15:43 | 2874 次阅读 | 0 个评论

作者
Vitor Baranauskas, Helder J. Ceragioli, Alfredo C. Peterlevitz, Marcelo C.Tosin, Steven F.Durrant
摘要
We studied the effects on the growth kinetics and properties of diamond and carbon-like diamond films obtained by the introduction of argon at low to high concentrations0]85 vol.% Ar.into the feed mixture ethanol and hydrogen. of a hot-filament chemical vapor depositionCVD.reactor. Scanning electron microscopySEM.analysis revealed that the addition of argon induces an increase in the diamond grain size, and increases the flaws between the grains and the density of vacancy defects. Well-faceted diamond films of good qualitymeasured by Raman spectroscopy.have been obtained using up to 65 vol.% of argon in the gaseous mixture, while higher concentrations85 vol.% Ar.produce diamond-like carbon or other complex carbon structures. We also observed an increase in the diamond growth rate with argon addition that was associated with an increase in carbon free radicalsup to ;40 vol.% Ar.or to the increase in the filament temperature necessary to keep the substrate temperature constant at higher Ar concentrationsabove ;40 vol.% Ar.. Room temperature photoluminescence spectroscopy also confirmed that argon addition increases the density of vacancy defects in the diamond structure.
详细资料
- 文献种类:期刊
- 期刊名称: Thin Solid Films
- 期卷页: 第377-378卷 303-308页
- 出版社: Brazil
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兴趣三星课题相关二星期刊影响两星 diamond HFCVD