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Nano structured physical vapor deposited coatings by means of picosecond laser radiation

by2005by 添加于 2012-3-25 13:01 | 1208 次阅读 | 0 个评论

作者
Bobzin K, Bagcivan N, Ewering M, Gillner A, Beckemper S, Hartmann C, Theiss S
摘要
Molding of nano structures by injection molding leads to special requirements for the tools e.g., wear resistance and as low as possible release forces of the molded components. On the other hand it is not allowed to affect the replication precision. Physical vapor deposition is one of the promising technologies for applying coatings with adapted properties like high hardness, low roughness, low Young's modulus and less adhesion to the plastics melt. Although physical vapor deposition technology allows the deposition of films on micro structures without changing the structure significantly, film deposition on nano structures and small micro structures leads to a relevant change in surface topography. For this reason direct structuring of physical vapor deposition coatings might be beneficial. In this paper structuring was done using a picoseconds ultraviolet laser, Lumera Laser "Rapid," with a master oscillator power amplifier system at 355 nm. Two different coatings were deposited by magnetron sputter ion plating physical vapor deposition technology for laser structuring tests ((Cr, Al)N, (Cr, Al,Si)N). After deposition, the coatings were analyzed by common techniques regarding hardness, Young's modulus and morphology. The structures were analyzed by scanning electron microscopy. The results show a high potential for laser structuring of coatings deposited via physical vapor deposition. Linear structures with sizes between 400 nm and 10microm were realized.
详细资料
- 文献种类: Journal Article
- 期刊名称: Journal of Nanoscience and Nanotechnology
- 期刊缩写: J Nanosci Nanotechnol
- 期卷页: 2011年第11卷第10期 8775-8781页
- 地址: Surface Engineering Institute, RWTH Aachen University, Aachen, Kackertstr. 15, D-52072 Aachen, Germany
- ISBN: 1533-4880
学科领域工程技术 » 材料科学
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