Ultralow-Noise SiN Trampoline MEMS for Sensing and Optomechanics
zqyin 添加于 2015-11-12 14:58
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作 者
Reinhardt C, Müller T, Bourassa A, Sankey JC 摘 要
In force sensing, optomechanics, and quantum motion experiments, it is typically advantageous to create lightweight, compliant mechanical elements with the lowest possible force noise. Here we report the fabrication and characterization of nanogram-scale S$_3$N$_4$ \"trampolines\" with room-temperature quality factors exceeding $4 times 10^7$, ringdown times exceeding five minutes, and force sensitivities below $20$ aN/Hz$^{1/2}$, with spring constants $2$-$4$ orders of magnitude higher than systems of comparable sensitivity. We also characterize the suitability of these devices for high-sensitivity interferometric readout and optomechanics applications, finding no evidence of surface or bulk losses from the processed nitride in an optical cavity achieving finesse 40,000. These demonstrated parameters provide access to a single-photon cooperativity $C_0=7$ in the resolved-sideband limit, and should furthermore enable quantum nondemolition readout of phonon shot noise with a signal-to-noise ratio of $250$, using an inherently single-port cavity. Alternatively (or simultaneously), these structures could be optically trapped to boost the mechanical quality factor to a value exceeding $10^8$ at room temperature.-
详细资料
- 关键词: cond-mat.mes-hall; physics.optics
- 文献种类: Manual Script
- 期卷页: 2015年
- 日期: 2015-11-5
- 发布方式: arXiv e-prints
- 备注:arXiv:1511.01769v1; 7 pages, 3 figures, 1 table
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学科领域 自然科学 » 物理学
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